| Reactor Style: | Rotary Reactor |
| Substrate Volume: | 10 or 40 mL |
| Reactor Temperatures Range: | 25 – 200 °C |
| Maximum Process Line Temperatures: | 200 °C |
| Vapor Draw Sources: | 2 standard, up to 8 |
| Dosing Valves: | Heated Metal Diaphragm |
| Vacuum Pump: | Rotary Vane (9 CFM or greater) |
| Regulatory Compliance: | CE Marked |
| Weight: | 300 lbs/ 140 kg |
| Options Available: | Substrate Loading
Plasma Source from Meaglow Low Vapor Pressure Containers capable of 150 °C Residual Gas Analyzer Waste Abatement Integrated Glovebox Research License for ALD on Particles Various Vapor Sources |