Rotary ALD Reactor – Pilot Series (RP)

Reactor Style: Rotary Reactor
Substrate Volume: 40 L
Reactor Temperatures Range: 25 – 200 °C
Maximum Process Line Temperatures: 200 °C
Vapor Draw Sources: 2 standard, up to 8
Dosing Valves: Heated Metal Diaphragm
Vacuum Pump: Rotary Vane (9 CFM or greater)
Regulatory Compliance: CE Marked
Weight: 500 lbs/ 230 kg
Options Available: Substrate Loading

Low Vapor Pressure Containers capable of 150 °C

Residual Gas Analyzer

Waste Abatement

Integrated Glovebox

Research License for ALD on Particles

Various Vapor Sources

 

Contact us: reactors@aldnanosolutions.com