| Reactor Style: | Fluidization Reactor |
| Substrate Volume: | 500 mL / 2 L / 5 L / 10 L |
| Reactor Temperatures Range: | 25 – 450 °C |
| Maximum Process Line Temperatures: | 200 °C |
| Vapor Draw Sources: | 2 standard, up to 8 |
| Dosing Valves: | Heated Metal Diaphragm |
| Vacuum Pump: | Rotary Vane (9 CFM or greater) |
| Regulatory Compliance: | CE Marked |
| Weight: | 400 lbs/ 180 kg |
| Options Available: | Substrate Loading
Low Vapor Pressure Containers capable of 150 °C Residual Gas Analyzer Waste Abatement Research License for ALD on Particles Various Vapor Sources |